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CH1012
SOME TECHNOLOGY
Aromatic photo-resist materials for
fabricating integrated circuit devices.
•
Light sensitive
aromatic resist.
•
Developer
is a solvent.
•
SiO
2
layer
below is
etched away
& then dopant
added.
Elemental silicon is obtained by reduction of molten SiO2.
SiO2
(l)
+ 2C
(s)
Si(l)
+ 2CO
(g)
then zone refined